Customised 5-Axis Manipulator for cleanroom class 6 operation

Positioning stability, dynamics and precision are crucial in the field of in-line wafer inspection to maximise troughput. PM was requested to deliver a multi-axis positioning solution for smooth high-speed scanning and reliable operation. Our system engineers worked closely together with the customer to understand their project needs and achieve the critical project goals.

Contact us to discuss your application

The challenges

  • Achieve a lead time as low as possible;

  • Design of a fast and accurate wafer stage with a box frame to let  x-ray beams pass;

  • Make a modular design to improve upgradability;

  • Cleanroom class 6 compatible.

The application

For next generation wafer inspection the customer developed a non-contact, non-destructive measurement for inline front-end processes. The benefits range from stand-alone applications to fully automated inline measurements where every single wafer can be measured in production. 

Results

• The first prototype was delivered within the time budget after the start of the project. This was a result of the fact that all company competences were combined. This allowed for great collaboration of the design, manufacturing and assembly processes;

• The box frame was optimised for stiffness to get a high as possible system bandwidth to make sure that settling times and accuracies were according to specification;

• The modular design allows for various configurations of the system. The system can either be equipped with 5 or 7 motion axis. Also, if desired, a vibration isolation system can be integrated.

Specifications

Stroke X-Y: 1050 mm x 490 mm
Speed: 1.4 m/s
Acceleration; 5 m/s2 for X-axis
Acceleration: 1 m/s2 for Y-axis

Stroke Z: 55 mm
Speed: 5 mm/sec
Drift: 50 nm in 20 sec.


Dual driven linear motor / AC motor driven
Cleanroom class 6 compatible
Repeatability short term < 5 microns
Repeatability long term < 10 microns
Jitter 50 nm/20 sec.upper X-Y axis
Jitter 1 micron/20 sec. lower X-Y axis

Absolute accuracy < 15 microns
Linear guides XY- low profile recirculating units UK-6

Capabilities

PM offers unique in-house capabilities with extensive R&D and engineering service, application expertise for vacuum and ultra-high vacuum environments,

 

in-house manufacturing, cleanroom assembly and various metrology and testing equipments. For more detailed information please see our competence page.

Related products